Japanese industrial giant TOTO is significantly expanding its semiconductor equipment components division. The company announced a 17 billion yen investment to construct a new research and development facility at its Chigasaki Plant in Kanagawa Prefecture. Construction is set to begin in December 2025, with completion targeted for April 2028.
This initiative focuses on next-generation electrostatic chucks and Aerosol Deposition process components. Electrostatic chucks utilize high-purity aluminum oxide ceramics to hold silicon wafers securely via electrostatic force in extreme vacuum and plasma environments during advanced chip manufacturing. The new facility will house expanded prototype manufacturing lines to streamline product development cycles for global semiconductor equipment makers.
This expansion forms part of TOTO's broader 30 billion yen capital expenditure plan through fiscal year 2028 dedicated to its advanced ceramics business. In parallel, TOTO is boosting electrostatic chuck manufacturing capacity at its Buzen Plant in Fukuoka Prefecture. By leveraging over a century of fine ceramics manufacturing experience, TOTO continues to reinforce its role as a key supplier in the global semiconductor supply chain.
